Introduction to Wafer Surface Defects Detection Using Deep Learning

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Wafer Surface Defects Detection Using Deep Learning Comprehensive Overview

Stanford graduate school class CS230 Fall 2019 Project, by SCPD students, Jie and Chen, Stanford graduate school class CS230 Fall 2019 Project, by SCPD students, Jie and Chen, Wafer defect analysis example

Reference Number: 1982 Title: Development of Intelligent

Summary & Highlights for Wafer Surface Defects Detection Using Deep Learning

  • In semiconductor manufacturing, detecting and classifying
  • Promicron microscopic AOI system,
  • Deep Learning
  • Wafer Defect Inspection
  • 2020 제27회 반도체학술대회 성균관대학교 이길준.

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